The Key Features
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The femtosecond micromachining system is mainly composed of a femtosecond laser and a high-precision platform. It utilizes the ultrashort laser pulse properties to achieve an unprecedented degree of control in sculpting the desired microstructures internal to the materials without collateral damage to the surroundings. Using femtosecond rather than picosecond or nanosecond light pulses, laser energy is deposited into small volumes by multiphoton nonlinear optical absorption followed by avalanche ionization.
Technical Parameters
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Laser Specification |
Working Platform |
Scanning System |
Optics System |
|---|---|---|---|
| Laser : Coherent Monaco Femto-second Laser | X-axis move range 400mm | hurrySCAN II 14 , NIR +green digital with 14 mm aperture | Lens tube of infinity f=200 |
| Wavelength : 1035±5 nm | Y-ais moving range 300mm | 2 x scanner and driver board | Illumination method : Coaxial type |
| Output power : 40W | Linear displacement accuracy ±3um | dual coated mirrors for NIR +Green | CCD camera with 2592X1944 pixel |
| Energy : 40uJ @1MHz | Straightness: 1.5um | tuning and SCANcheck burn-in test | Industrial standard : compatible with RoHS |
| Pulse width : <350 fs | Flatness: ±1.5um | Repeatability <0.4µrad | |
| Tuning range : <350fs to 10ps | Bi-directional repeatability: 0.1um | Digital encoder | |
| Spatial Mode TEM00, M² <1.2 | Resolution: 5nm | Laser damaged threshold for Fs Laser 40W | |
| Power stability : < 2% | Feedback: Non-contact linear encoder | NIR F-Theta scan lens with FL 160 and scan | |
| Repetition Rate : Single-shot to 1MHz,higher rep rates without AOM | Pitch: 15 arc-sec | range 100mmx100mm | |
| Pulse picking:1 to 50 MHz standard | Yaw: 15 arc-sec | Green F-Theta scan lens with FL 175mm | |
| Roll: 8 arc-sec | |||
| Max velocity: 500mm/s | |||
| Positioning accuracy <3um |
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